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    • PVA TePla America, LLC
    • 251 Corporate Terrace
      Corona, Ca 92879.
    PVA TePla America, LLC/Products/Microwave Plasma Systems/Microwave Plasma Photoresist Ashing/MICROWAVE PLASMA SYSTEM GIGAFAB M

    MICROWAVE PLASMA SYSTEM GIGAFAB M

    The GIGAfab series targets SU-8 Removal, MEMS Fabrication, Wafer Bumping and Flat Panel Display Technology.

    These system features:

    • Unique planar source geometry.
    • Temperature-controlled substrate plate for large area processing. (plate: 310 x 310 mm)
    • Drawer type unloading / loading.
    • Multiple substrates for Descum, Ashing and Surface Conditioning.
    • Microwave power: 2000 Watt max.
    • Certified Hydrogen gas option available.

    Technical Specifications:

    Plasma Chamber:

    • Aluminum
    • W x H x D = 410 x 140 x 410 mm

    Plasma Generation:

    • MW Frequency 2.45 GHz
    • max. 1600 Watt
    • variable power

    System Dimension:

    •  W x H x D = approx. 850 x 2.000 x 1300 mm
    •  Weight: 550 kg

    Options:

    •   Additional gas channels
    •   Vacuum pump

    Related Applications:

    • Photoresist Ashing
    • SU8 Ashing