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    • PVA TePla America, LLC
    • 251 Corporate Terrace
      Corona, Ca 92879.

    IoN 30 Plasma System

    IoN 30 plasma system

    The IoN 30 plasma system is designed for R&D and low volume production applications. A compact, fully integrated radio frequency (RF) generated plasma is used in IoN 30 plasma system. The small table top design is specifically intended to meet the evolving demands of customer surface treatment needs at a low cost of ownership. PVA TePla is a proven and trusted resource globally for high-quality, reliable, cost-effective and easy to operate gas plasma systems. It offers some of the most advanced and innovative solutions for a wide variety of applications.

    Typical Applications:

    • Surface cleaning
    • Surface activation

    Features Include:

    • Small foot print table top design
    • Plug and play self installation
    • 45 mm (1.77”) diameter view port
    • Flexible electrode
    • PC touch screen
    • Graphical User Interface (GUI)
    • Recipe editor for fast and versatile step controls

    To Request a Brochure/Literature/Product CD, Click Here

    IoN 30 Plasma System Technical Data

    Process Chamber

    • Material: Aluminum
    • Dimension: 330 mm W x 350 mm D x 250 mm H
    • 13”x13.78”x9.84”
    • Volume: 28.88 L (1.02 ft3)
    • Electrodes: Ceiling, single shelf
    • Number of MFCs: 1
    • Base Pressure: 0.07 mbar (50 mTorr))
    • Pumping Time: 1 min (Pump dependent)
    • Loading: Manual

    Plasma Generator

    • Frequency/power: (20 to 100) kHz/300 W

    Options

    • Water cooled electrode
    • Secondary plasma
    • Faraday/Etch cage
    • Additional MFCs
    • Corrosive gas MFCs
    • Process pressure control
    • Light tower with R/Y/G/Buzzer
    • Vacuum pumps (Rotary Vane, scroll)

    Safety Certification Standards

    • CE certified
    • EN 61010
    • EN 61326

    Machine Dimension and Weight

    • 780 mm W x 760 mm D x 800 mm H
    • (30.7”x29.9”x31.5”)
    • 59 kg (130.1 lb) (Varies with options)

    Facilities Requirements

    • Electricity: (110/220) VAC, 1f, 50/60 Hz, 3 wire,
    • 2.3 kW
    • Process Gas Input Pressure: 1.4 bar (20 psi)
    • Purge Gas Input Pressure: 1.4 bar (20 psi)
    • Compressed Air Input Pressure: 1.4 bar (20 psi)