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    • PVA TePla America, LLC
    • 251 Corporate Terrace
      Corona, Ca 92879.
    PVA TePla America, LLC/Products/Microwave Plasma Systems/Surface Treatment & CVD Deposition/GIGA 690 Solar

    GIGA 690 Solar

    GIGA 690 Solar

    The Microwave Plasma System GIGA 690 Solar is a dedicated and reliable plasma system widely used in solar cell manufacturing for edge isolation. The system features unique microwave source technology for high etch rate. The telescopic stage option allows for easy loading of the wafer stack. A loading bench assists wafer stacking and application of the cell clamp.

    Technical Specifications:

    Plasma Chamber:

    Aluminum
    W x H x D = 400 x 400 x 400 mm

    Plasma Generation:

    MW Frequency 2.45 GHz
    max. 1.000 Watt
    variable power

    System Dimension:

    W x H x D = approx. 1.050 x 1.750 x 800 mm

    Weight:

    150 kg

    Options:

    • Vacuum Pump System
    • Additional gas channels 3-4
    • Aluminum rotary platform, 350 mm Ø
    • Telescopic rotory stage
    • Cell stack holder with stacking accessory