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4150 Plasma system

Features and Specifications

Branson/IPC Series 4150 plasma asher/cleaner system


PM 4150-11630 reactor center, with 16" (dia) x 30" (D) aluminum chamber, Mod. PM 703 1500W automatch network, Series 4000 gas panel, 2 gas inputs, built in wattmeter and vacuum guage, auto/manual logic;
Mod. PM 906U-4 single channel digital controller, w/0-99.9 minute elapsed time display, auto/manual logic; Mod PM 112 RF Generator, 1000W @ 13.56 MHz, 208-240VAC/1Ph/50 or 60Hz/40 FLA
W/faraday cage insert.







Branson / IPC 4150 Plasma System

Did you know that PVA TePla may be able to perform maintenance, repair, or provide spare parts to this system? Please contact our customer service department for further information.

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