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GIGA 690 Solar

Technical Specifications:

Plasma Chamber:
 W x H x D = 400 x 400 x 400 mm

Plasma Generation:
 MW Frequency 2.45 GHz
 max. 1.000 Watt
 variable power

System Dimension:
W x H x D = approx. 1.050 x 1.750 x 800 mm

 150 kg

 Vacuum Pump System
 Additional gas channels 3-4
 Aluminum rotary platform, 350 mm Ø
 Telescopic rotory stage
 Cell stack holder with stacking accessory

Related Applications:

  • Solar Cell Etching

    Plasma  System GIGA 690 Solar

    GIGA 690 solar
    The Microwave Plasma System GIGA 690 Solar is a dedicated and reliable plasma system widely used in solar cell manufacturing for edge isolation. The system features unique microwave source technology for high etch rate. The telescopic stage option allows for easy loading of the wafer stack. A loading bench assists wafer stacking and application of the cell clamp.


    Solar Edge Isolation Clamp Solar Cell Isolation Clamp Loading
    Cell Clamp Loading Bench

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