Plasma System 400 - 660 Solar | PVATePla America, Inc.
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Microwave Plasma System PS 400 SOLAR

Technical Specifications:

Plasma Chamber: Aluminum,
W x H x D = 400 x 400 x 400 mm

Plasma Generation: MW Frequency 2.45 GHz, max. 1.000 Watt, variable power

System Dimension:
W x H x D = approx. 900 x 600 x 760 mm
(PS 400 Solar)
W x H x D = approx. 1.050 x 1.720 x 770 mm (PS 660 Solar)

Weight:
150 kg (PS 400 Solar)
180 kg (PS 660 Solar)

Options:
Vacuum Pump System
Additional gas channels 3-4
Aluminum rotary platform, 350 mm Ø
Easy loading accessory
Cell stack holder with stacking accessory

Related Applications:

  • Solar Cell Etching

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    PS400 Solar

    PS 400 Solar

    The Microwave Plasma System PS 400/660 Solar is a dedicated and reliable plasma system widely used in solar cell manufacturing for edge isolation. The system features unique microwave source technology for high etch rates. The telescopic stage option allows for easy loading of the wafer stack. A loading bench assists wafer stacking and application of the cell clamp.

     

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