
Did you know that PVA TePla may be able to perform maintenance, repair, or provide spare parts to this system? Please contact our customer service department for further information.
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Branson/IPC Series 4155 plasma asher/cleaner system
| Branson/IPC | |
| Model | 4155/2 |
| Rated Power Output | 1250 Watts |
| Chamber Construction | Aluminum |
| Chamber Size | |
| Width | 14.00 in (35.56 cm) |
| Depth | 30.00 in (76.20 cm) |
| Height | 14.00 in (35.56 cm) |
| Number of Gas Inputs | Two Gas |
| Automatching Network | Yes |
| RF Generator Model | OEM12 |
| Panel Meters | Analog |
| External Cooling | Water Cooled |
| Accessories | Faraday Cage(installed) Etching Tray: seven shelves with 1 1/2″ between shelves |
| Other Information | RF Generator: Solid state, model OEM12 (not shown on the photo)200-240V 20.0A 50/60Hz 1 Phase Controller: Model: S2000(Part No. 10462) 120V 6.0 A 50/60 Hz 1 Phase Has 6 gas ports Dimensions: 25″W x 20″D x 9″H Etch tunnel dimensions: 11.5″W x 26″D x 11.5″H MKS pressure transducer–Type 122A Vacuum port flange KF 40 |
| Power Requirements | 200-240 V 20.0 A 1 Phase |