PVA TePla is a market leader in microwave plasma processing used in the fabrication of microchips, MEMS devices, photovoltaic cells, flat panel displays and detectors, etc. Semiconducting materials such as silicon, III/V compounds, lithium niobate etc. are processed in the safe environment of microwave generated plasmas for applications such as photoresist ashing, wafer thinning and stress relief, bond pad cleaning prior to wirebonding, and activation prior to over-molding. Microwave plasmas are especially suited to treating devices that are electrostatically sensitive.

PVA TePla also offers metrology tools for advanced quality monitoring and assessment of wafers during production. The SIRD system is used for mechanical stress measurement and the TWIN for ion-implant dose monitoring. Our metrology systems are fully 300mm compatible and comply with all requirements of class 1 clean room.