Home Applications Semiconductor  
   

Wafer stress relief by plasma etch

 

Plasma Based Solutions:

Semiconductor wafer
Photoresist Ashing
Solar Cells
Solar Cell Etching
MEMS
MEMS SU8 Ashing
Flat Panel Displays
Pixel Activation
FP Photoresist Ashing
Bond Finger Cleaning
Chip Packaging
Bond Pad Cleaning
Flip Chip Underfill
Encapsulation
Wafer Metrology
Stress Imaging
Implant Dosage
Failure Analysis
Decapsulation

 Backside stress relief post CMP on ultra thin wafers

Back grinding only Back grinding plus stress relief
Back grinding to relieve stress relief Back grinding plus stress relief

The process of backgrinding induces wafer stress that can propagate into the bulk of the wafer causing it weaken. This weakening effect of the wafer can be repaired by PVA TePla’s plasma stress relief process. Backgrinding tape protects the active side of the wafer during the thinning process (grinding from 725 µm down to a target thickness of e.g. 75 µm). After this, the stress relief by remotedownstream plasma etch is applied to the wafer backside in order to eliminate the 3 µm zone of damaged silicon left behind after thinning. Downstream plasma is a cold, dry, isotropic plasma etch process containing no free ions or electrons that could potentially charge the surface of the wafer. The back-grinding tape is protected by limiting the process temperature to about 70°C, avoiding any damage to the back-grinding tape. Stress Relief can be applied in-situ with Passivation and Wafer Thinning.

Click here for video

 

To Request Application Literature or Further Information, Click Here

Related Products:
b
asyntis

Fully Automated Downstream Plasma System with automatic substrate loading and unloading

GIGA 80 Plus ASYNTIS
d
4008

Plasma System for processing of 6", 8", and 12" wafers / framed wafers

GIGAfab ASYNTIS M
a
 

 

 

What is plasma?
Plasma Technology
 
Why Microwave?
Microwave Plasma Technology
 
Why
Ultra Thin Wafers?
 
Wafer Thinning Semiconductor Application
 
  Why Stress Relief?
Semiconductor Application Stress Relief
 
 

Why
Plasma Treatment?

 
Plasma Treatment Systems

 

© 2007 - 2016 PVA TePla America. All rights reserved.