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Plasma cleaning flat panels


Plasma Based Solutions:

Semiconductor wafer
Photoresist Ashing
Solar Cells
Solar Cell Etching
MEMS SU8 Ashing
Flat Panel Displays
Pixel Activation
FP Photoresist Ashing
Bond Finger Cleaning
Chip Packaging
Bond Pad Cleaning
Flip Chip Underfill
Wafer Metrology
Stress Imaging
Implant Dosage
Failure Analysis

 Flat Panel Photoresist Ashing

Uniform Plasma cleaning of large substrates for manufacturing of display requires a scalable system concept. The planar microwave plasma systems are designed for such applications and deliver fast and uniform cleaning or stripping results. The microwave plasma process benefits from high radical concentration and plasma density along with low process-induced heating. Good uniformity is essential for maintaining excellent process control on a single substrate as well as for run-to-run repeatability.

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Related Products:
Automatic System for single, large-sized glass panels
GIGAfab Gen 2



Semiconductor wafer boat
Wafer Cleaning
Chip packager

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