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Decapsulation of Integrated Circuits

 

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Decapsulation

Decapsulation of packaged devices by plasma etching

Decapsulation of Integrated Circuits (Failure Analysis)

Decapsulation of packaged devices (such as integrated circuits (IC’s) and printed circuit boards (PCB’s)) exposes the internal components of the package. Opening devices by decapsulation allows inspection of the die, interconnects and other features typically examined during failure analysis. Device failure analysis often relies on the selective etching of polymer encapsulants without compromising the integrity of the wire bonds and device layers. This is achieved by using microwave plasma to cleanly remove encapsulant material. The etching properties of the plasma are highly selective leaving interconnects and bond pads unaffected by the plasma etching process.

(Examples of decapsulated chips)
Failure Analysis Decapsulation of IC

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Related Products:
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IoN Wave 10 Laboratory or pilot scale bench top microwave system ideal for resist ashing, wafer cleaning and decapsulation of electronic devices
IoN Wave 10
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Semiconductor wafer boat
 
 
Wafer Cleaning
Chip packager

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