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Optimus 100 Gas Plasma System

Technical Data

Process Chamber
Aluminum (A)
450 x 400 x 690 mm (W/H/D)
17.7 x 15.75 x 17.2 in
Standard 3 Shelf Electrode Trays
380 x 580 x 101 mm (W/D/H tray to tray)
15 x 22.8 x 4 in
Process Gas
Mass Flow Control Up to 6 gasses
Process Pressure Approx. 120-2000 mTorr
Evacuation Time ~1 minute (pump dependen

RF Generator Air cooled
Frequency 13.56 MHz
Power Output 0-600 watts
0-1000 watts
Power Requirements
Electricity 208-240 VAC, 3 phase 30A
50/60 Hz 5-wire (standard)
380/415 VAC, 3 phase
15A 50/60
Process Gas Input pressure 1-2 bar / 30 PSI
Purge Gas Input pressure 1-2 bar / 30 PSI
Compressed Air Input pressure 5 bar / 75 PSI
· Self contained footprint featuring all power and gas
· Easy Roll around chassis with leveling feet
Standard 1000 x 970 x 1850 mm (W/D/H)
39.4 x 38.2 x 72.8”
Weight 490 kg / 1078 lbs. (with pump)
· 1% pressure monitor
· Recirculating liquid chiller
· Pressure controller
· Light tower
· Barcode reader
· Spectrographic endpoint detection
· MFC upgrade for corrosive gasses
· Printer
· Liquid monomer delivery system
· Vapor phase MFC
· Sublimator
· Vacuum pumps (rotary vane, dry, scroll and blower package)

Safety Certification Standards

  • CE certified
  • EN 60204
  • EN 61326

IoN Optimus 100 Plasma System (legacy system)

The IoN Optimus 100 plasma system offers new and innovative
features on a proven technology platform. The IoN Optimus 100
is an exceptionally well designed system emphasizing versatility
and control. Its advanced features include configurable power
coupling modes, ergonomic design with automatic door, data
capturing software with Ethernet communication, state of the art
process control and fail-safe system alarms. The ION Optimus
100 uses radio frequency (RF) generated plasma in a compact,
fully integrated package.

Features include:

  • Flexible electrode design for improved process uniformity
    accommodating both primary and secondary plasma modes
  • PC controlled with Windows® XPe OS
  • Software written to both Semi E95-1101 and FDA CFR Title
    21 Pt. 11 guidelines
  • Recipe driven processes
  • Self diagnostic features and graphing
  • Ethernet communications
  • Energy saving control features
  • Ergonomic chamber loading and unloading
  • Vertical door with automatic hand and foot actuators
  • Simple plug and play installation

The IoN 100 has replace this system. Please call customer service about this system.

Did you know that PVA TePla may be able to perform maintenance, repair, or provide parts to this system? Please contact our customer service department for further information.

800-527-5667 M-F 8am - 5pm Pacific Time.

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