Single button initiates routine processing. Three gas inputs.
Quartz process chamber: 10 in. dia. x 20 in. D.
For batch wafer process.
PM119 13.56 MHz RF Generator.
Includes vacuum pump.
Branson / IPC S2005 Barrel Asher
Did you know that PVA TePla may be able to perform maintenance, repair, or provide spare parts to this system? Please contact our customer service department for further information.