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P3100 Plasma system

Features and Specifications

Branson/IPC Mod. P3100 plasma asher/stripper system, consisting of:


• Branson/IPC Mod. P3075 Reactor Center, w/1ea 12" (dia) x 20" (D) quartz chamber, Mod. 732 1000W automatch network, EPD 2000 End of Process Detector;

• Branson/IPC Mod. 3000+ Controller, single channel, two gas inputs, 0-99.9 minute digital timer with display; (similar controller to 906U-4 controller, for 4000 system)

• Branson/IPC Mod. PM 132 RF Generator, 1000W @ 13.56 MHz, continuously variable;

• Branson/IPC Mod. Power Distribution Module;

• Installation requirements: Dry control air 60-80 psig, process gasses, 15 psig nominal, Electrical power 190-250VAC/1Ph/40A/50/ 60Hz.





P3100
Branson / IPC P3100 Plasma System

Did you know that PVA TePla may be able to perform maintenance, repair, or provide parts to this system? Please contact our customer service department for further information.

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