Home->Legacy Plasma Systems   Details

P2100 Plasma system

Features and Specifications

Branson P2100

Make:
Type:
Model:
P2100

Description:
Plasma Etcher/Stripper.

Automatic and manual modes.

Three process timers and three gas inputs.

PM132 1000W 13.56 MHz RF generator.

150mm wafer compatible.

Quartz Process Chamber: 12 in. dia. x 20 in. D. Includes vacuum pump
BRANSON/IPC

 



Branson/IPC P2100 Plasma System

Did you know that PVA TePla may be able to perform maintenance, repair, or provide parts to this system? Please contact our customer service department for further information.

800-527-5667 M-F 8am - 5pm Pacific Time.

© 2007 - 2016 PVA TePla America. All rights reserved.