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L2100 Plasma system

Features and Specifications

Branson L2101

* Branson/IPC Mod. PM 11220 LP Reactor Center,

12" (dia) x 20" (D) quartz chamber, low particulate capability, 1ea Mod. PM 732 1000W automatch network, temperature probe, Dimensions: 28"Wx31"Dx20"H;

* Branson/IPC Mod. 9110 controller, multistep/multirecipe capability, up to 350 steps, CRT system status display, including gas and vacuum valves, mass flow controller outputs, forward/reflected power, chamber pressure/temperature, current recipe and step status, and step terminator options (pressure, time, temperature, or endpoint signal),

* Branson/IPC Mod. 9160 Gas Handling Module, w/5ea mass flow controllers calibrated for: 2 SLPM N2, 2 SLPM O2, 200 SCCM O2, 1 SLPM CF4, 200 SCCM CF4, Auto Solenoid Valves;

* Branson/IPC Mod. 332 RF Generator, solid state, 1000W @ 13.56 MHz, 190-250VAC/1Ph/50/60Hz/40FLA, mounted in Power Cabinet Assy, w/Power Distribution Module

Branson/IPC L2101 Plasma System

Did you know that PVA TePla may be able to perform maintenance, repair, or provide parts to this system? Please contact our customer service department for further information.

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