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7102 Plasma system

Features and Specifications

 
Manufacturer Branson/IPC
Model 7102
Etcher Type Box
Rated Power Output 1000 Watts
Number of Gas Inputs Two Gas
RF Generator Model ENI Power Systems--Model OEM-12AB-3
Panel Meters Digital
Accessories MKS pressure transducer--Type 122A
Seven shelf insert (option)
Chamber workholder--#91381--Part No. 15699-03--Manufactured 1990
Controller workholder--#91381--Part No. 15676-01--Manufactured 1990
Other Information RF Generator:
  • 250 V, 20 A, 1 phase
  • Exterior dimensions: 17"W x 16.5"D x 8.25"H
    Front panel digital display has CRT display
    Vacuum connection: KF 40
    Etch tunnel dimensions: 11.5"W x 26"D x 11.5"H
    3" diameter view port in door
  • Exterior Dimensions
      Width 25.000  in  (63.5 cm)
      Depth 44.000  in  (111.8 cm)
      Height 44.000  in  (111.8 cm)
    Weight 800  lb  (363 kg)





    Branson 7102
    Branson / IPC 7102 Plasma System

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