Home->Legacy Plasma Systems   Details

7102 Plasma system

Features and Specifications

Manufacturer Branson/IPC
Model 7102
Etcher Type Box
Rated Power Output 1000 Watts
Number of Gas Inputs Two Gas
RF Generator Model ENI Power Systems--Model OEM-12AB-3
Panel Meters Digital
Accessories MKS pressure transducer--Type 122A
Seven shelf insert (option)
Chamber workholder--#91381--Part No. 15699-03--Manufactured 1990
Controller workholder--#91381--Part No. 15676-01--Manufactured 1990
Other Information RF Generator:
  • 250 V, 20 A, 1 phase
  • Exterior dimensions: 17"W x 16.5"D x 8.25"H
    Front panel digital display has CRT display
    Vacuum connection: KF 40
    Etch tunnel dimensions: 11.5"W x 26"D x 11.5"H
    3" diameter view port in door
  • Exterior Dimensions
      Width 25.000  in  (63.5 cm)
      Depth 44.000  in  (111.8 cm)
      Height 44.000  in  (111.8 cm)
    Weight 800  lb  (363 kg)

    Branson 7102
    Branson / IPC 7102 Plasma System

    Did you know that PVA TePla may be able to perform maintenance, repair, or provide spare parts to this system? Please contact our customer service department for further information.

    800-527-5667 M-F 8am - 5pm Pacific Time.

    © 2007 - 2016 PVA TePla America. All rights reserved.