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4055 Plasma system

Features and Specifications

Branson 4055

The Branson/IPC Mod. 4X55 series is a barrel type batch system for cleaning, and surface treatment of small electronics, optics, and other parts. It can also be used for solar cell processing (nitride etch for front to back isolation). The system is based on proven reactor designs developed over the past twenty years at Branson/IPC, GaSonics/IPC and MetroLine/IPC. Hundreds of systems are in use in wafer processing applications throughout the world. 

• PM 4055/2 reactor center, with 5ea 7" (W) x 17” (D) aluminum shelves, Mod. PM 702A 1000W automatch network, all aluminum chamber;
• Mod. 4000C single channel digital controller, w/0-99.9 minute elapsed time display, analog wattmeter, 2ea gas inputs, auto/manual logic;
• Mod PM 119 RF Generator, 500W @ 13.56 MHz, 120VAC/1Ph/50 or 60Hz/15 FLA

RF power is provided through a solid state air cooled 13.56 MHz generator. This is an aftermarket upgrade.

Impedance matching is automatic and reliable.

Branson 4055
Branson/IPC 4055 Plasma System

Did you know that PVA TePla may be able to perform maintenance, repair, or provide spare parts to this system? Please contact our customer service department for further information.

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