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4000 Plasma system

Features and Specifications

Branson/IPC Series 4000, plasma asher/cleaner system, with:


PM 11020 reactor center, with w/10" dia x 20" (D) quartz chamber, Mod. PM 702 1000W automatch network, (Series 4000 gas panel has 2 gas inputs w/rotometer metering controls), built in wattmeter and vacuum guage, Dim: 37"W x 33" D x 21" H, 150 lbs;
Mod. PM 906U-4 single channel digital controller, auto/manual logic, 0-99.9 min elapsed time display, 13.5"W x 16.5"D x 5"H, 20 lbs;
Branson/IPC Mod. PM 112 RF Generator
1000W @ 13.56MHz, 220VAC/1Ph/60Hz/40FLA






Branson / IPC 4000 Plasma System

Did you know that PVA TePla may be able to perform maintenance, repair, or provide spare parts to this system? Please contact our customer service department for further information.

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