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IoN 7 LOW COST PLASMA SYSTEM

Technical Data

Process Chamber
Material
High grade, hard anodized
Aluminum

Volume
~7 Liters

Inner Dimensions
254W x101.6 H x 254 mm D
10”W x 4”H x 10”D

Substrate Work Area
200 W x 50 H x 200 mm D
8”W x 2”H x 8”D

RF Generator
13.56 MHz,
Variable 10 to 300 Watts
Auto-tuning

Power Requirements
Electricity
110 VAC or 220 VAC single phase, 10
amp 50/60 Hz, 3 wire

Process Gas
Regulated to 10 PSIG Connections
made by either .25” O.D. stainless steel
or Teflon tubing

External Gas
.25” FPT, Vacuum pump: KF40 Flange

Dimensions
406.4 W x 406.4 H x 660.4 mm
16”W x 16”H x 26”L

Weight
With vacuum pump: 95 lbs
(43 kg)

Options

  • Second Gas Flow Meter
  • Third Gas Flow Meter
  • 7CFM 2 stage rotary vane vacuum pump with PFPE
  • N2 purge gas flow meter option
  • 600 W power supply
  • Spare Parts Kit
  • Barrel chamber 160mm Diameter 254 mm Deep
  • Table

Safety Certification Standards

  • CE Certified

 

IoN 7

IoN 7 Plasma System
The IoN 7 is our latest advancement in low cost bench top vacuum plasma systems. The IoN 7 is a simple to use manually controlled table-top anodized aluminum chamber plasma reactor. It is ideal for university research laboratories and low volume production facilities. The system has an auto-tuned 13.56 MHz RF power supply with variable output 10 to 300 Watts in single Watt increments. Controllable parameters include, time, pressure, power gas flow and mixture. The chamber volume is W 254 mm x L 254 mm x H 101 mm. The electrodes accomodate components with a maximum working area of W 200 mm x L 200 mm x H 50 mm or wafers up to 200mm (8”). Applications include precision cleaning, bond promotion, surface activation, photo resist ashing, de-capping or RIE applications.

RIE or Plasma
The system comes with two unique electrodes. One electrode is
designed specifically for RIE processing, and the other for less
aggressive plasma processing.

Features include:

  • Pressure Display – a Pirani gauge monitors chamber pressure
    relative to selected gas flow.
  • Automatic Matching Network tunes power coupling into the
    chamber
  • Process Timer is operator programmable for automatic system
    operation.
  • Gas Flow Meter with electronic on/off solenoid control (CDA, O2,
    Ar , He, CF4)
  • Anodized Aluminum Chamber – inert to fluorine
  • Solid state electronics
  • Electrode design provides maximum power distribution and a
    uniform plasma
  • Sheet metal used in the construction is custom zinc coated steel
  • Enclosure is painted with polyurethane
  • Integrated electronic system diagnostics board shows the status of
    the system for maintenance and troubleshooting.
  • Instructional video and user manual for simple start up and
    operation


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