ION 3 Low Cost Plasma System
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Technical Data

Process Chamber
High grade Aluminum-Rectangle

~3 Liters, rectangle chamber

Inner Dimensions
140 W x 200 H x 110 mm D
5.5”W x 7.9 ”H x 4.3 ”D

RF Generator
20 ~ 100 KHz, 100 Watts (Standard)

Power Requirements
110 VAC or 220 VAC single phase, 10
amp 50/60 Hz, 3 wire

Process Gas
Mass Flow- Control Up to 3 gasses
Gas Manifold- 5 inputs, one output to chamber
Base Pressure- ~50mTorr
(pump and gas flow depend-ent)
Venting gas- N2, CDA

580 W x 610 D x 350 H mm
23 ”W x 24 ”D x 14 ”H

59 kg / 131 lbs.

Vaccum Pump
7CFM 2 stage rotary vane vacuum pump with PFPE


  • 2nd & 3rd flow-meter
  • Spare Parts Kit
  • Table

Safety Certification Standards

  • CE Certified
  • EN 61010
  • EN 60204



IoN 3B Plasma System
The IoN 3B is a low cost vacuum plasma technology. Gas plasma is fast becoming the technology of choice for surface modification of materials in the life sciences, electronic and industrial arenas due to its versatility and low impact to our environment. For example, the trend towards miniaturization in medical diagnostics requires precision cleaning and activation. Plasma removes organic contamination several orders of magnitude more efficiently than wet chemical processing. As a result, plasma is replacing older types of treatments that are no longer practical or economical.

The IoN 3B is designed to meet the evolving demands of our customers, emphasizing outstanding versatility and control and at very low cost for our customers surface treatment needs. Its advanced features provide state of the art process control, fail-safe system alarms. The IoN 3B uses radio frequency (RF) generated plasma in a compact, fully integrated package. Its bench top design allows for easy installation in laboratory or production environments.

Features include:

  • Gas Shower Head Integrated door
  • Single gas channel Mass Flow Controller for gas control, 50 sccm, gas type determined by customer
  • Pressure Measurement, Pirani Gauge
  • View Port, 45mm dia
  • Windows CE operating system
  • 7” touch screen PC interface
  • Vacuum pump, Rotary Vane, ~3.5 CFM, 115V, 60Hz., with mist eliminator and 2m vacuum hose, inlet and hose connection—NW25

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