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IoN 18 Gas Plasma System

Technical Data

Process Chamber
Material
Aluminum
Volume
18 liter
Inner Dimensions
228 x 330 x 238 mm
9” x 13” x 9.38”
Available Electrodes
Primary Plasma
- (3) Removable trays 266 mm x 165 mm 10.50” x 6.5”
Secondary Plasma electrode

Process Gas
Mass Flow Control up to 4 gasses
Process Pressure Approx. 120-2000 mTorr
(pump and gas flow dependent)
Evacuation Time ~1 minute (pump dependent)
Venting Adjustable

RF Generator
Air cooled
100 KHz, 300 Watts (Standard)

Power Requirements
Electricity
110 VAC or 220 VAC single phase, 2.3 KW, 50/60 Hz
Process Gas Input pressure 1-2 bar 30 PSI
Purge Gas Input pressure 1-2 bar 30 PSI
Compressed Air Input pressure 5 bar
75 PSI
Dimensions

775 x 723 x 781 mm
30.5” x 28.5” x 30.75”

Weight
141 kg / 310 lbs.

Options

  • Automated monomer system
  • Sublimation system
  • Vapor Phase MFC
  • Light tower
  • Barcode reader
  • Spectrographic endpoint detection
  • 300 and 600 watt 13.56 MHz generator
  • Stainless steel MFC” and gas lines
  • Printer
  • Table
  • Vacuum pumps (rotary vane, dry and scroll)

Safety Certification Standards

  • CE certified
  • EN 61010
  • EN 61326

IoN 18 Plasma System

The IoN 18 is our latest advancement in low cost vacuum plasma technology. Gas plasma is fast becoming the technology of choice for surface modification of materials in the life sciences, electronic and industrial arenas due to its versatility and low impact to our environment. For example, the trend towards miniaturization in medical diagnostics requires precision cleaning and activation. Plasma removes organic contamination several orders of magnitude more efficiently than wet chemical processing. As a result, plasma is replacing older types of treatments that are no longer practical or economical.

The IoN 18 is designed to meet the evolving demands of our customers, emphasizing outstanding versatility and control at a very low cost for our customers surface treatment needs. Its advanced features provide state of the art process control, fail-safe system alarms and data capturing software. This enables the system to meet stringent quality control programs in many different markets. The IoN 18 uses radio frequency (RF) generated plasma in a compact, fully integrated package. Its bench top design allows for easy installation in laboratory or production environments.

The IoN 18 offers a significant advantage over similar systems. It can be easily field upgraded to meet higher volume requirements or advanced processing capabilities without the need to procure a different machine.

Features include:

  • Fully configurable chamber that can accommodate various electrode configurations for medium sized complex 3-dimensional parts or high volume small part processing
  • Industrial computer with a Windows® based System (Standard)
  • Programmable Logic Controller PLC (Optional)
  • Graphical User Interface (GUI) software complies with CFR Title 21 Part 11 and Semi E95-1101
  • User access control for separate process development, operator and maintenance programming and control
  • Configurable process tolerance controls allowing precise lot-to-lot repeatability
  • Remote statistical process control monitoring via Ethernet
  • Onboard diagnostic features and alarm logging
  • Recipe editor offers fast and versatile step control functionality
  • Liquid Crystal Display (LCD) touch panel and Keyboard
  • Alternate gas selector


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