Technical Data

• Process temperature: 500 – 950 °C.
• Load: up to 250 kg, ingot blocks, tops, tails, poly-Si rods.
• Batch process time: 45 – 60 min.
• Heater element: 490 mm (ID) X 1,200 mm (L), clam shell construction; heating zone length 1,000 mm. Heaters: KANTHAL materials, 70 elements, 80 kW power under typical operations, covered with water-cooled Titanium (Ti) and quartz plates.
• Load basket: Water cooled, welded S.S. pipes with Ti coating, automatic basket transferring.
• DIW Bath: 478 liter in volume, HT PVC materials, with temperature and DIW resistivity monitoring.
• Temperature control: PID control, 4 zones, R-type thermocouple mounted in ceramic tube.
• Cooling water: DIW, 18.2 M?, Temp = 20-25°C
• Process control: Integrated automatic control.

Utilities & Footprint

• Power: 480 V, 3 phase, 60 Hz, 4-wire, max 85 kVA. Also, 230 V, 1 phase, max 2 kVA. Grounding connection is required for safety.
• Compressed dry air: 70-100 psi pressure, 60 l/min.
• Cooling water: 30 l/min, = 6 psi pressure, 20 - 25°C.
• DIW: 40 l/min, 4-5 psi pressure, 18.2 M?, 20 - 25°C.
• Exhaust: 30 m³/min, -4.2 psi, 150 mm (dia.) pipe.
• Footprint: 3,150 mm (W) x 3,000 mm (D) x 2,450 mm (H).
• Weight: approx. 3,500 kg / 7,800 lbs.

Safety

• Furnace door: automatic, pneumatic cylinder drive.
• Alarm light tower: 3-color tower light, colors “R, G, Y”.
• Safety door:2 panels with hinged door.
• Other safety interlock devices are also equipped.

Complimentary Systems

• Heat vacuum dryer
• DIW re-circulation system