CVD SYSTEMS
     
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CHEMICAL VAPOR DEPOSITION (CVD) SYSTEMS

 

RGM 210

 

RPX-540 VAPOR DEPOSITION SYSTEM

 

RPX 540

 

IST CVD Systems feature:

Vaporrix(TM) Interchangeable Chemical Cartridges

Consistent vapor delivery requires accurate and consistent control over the thermal environment. IST accomplishes this in its Vaporrix system, by incorporating several key design features:

  • Fire/smoke alarm for flammable precursors
  • Adjustable flow channel
  • Heated and insulated solid block gas lines
  • Separate enclosure for flammable precursors
  • On/off pneumatic valve
  • Carrier gas
  • Heated and insulated liquid cartridges

 

Vaporrix

 

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