Controller: Windows® O/S based touch screen interface offering fully automatic control. Multi-step recipes, real time graphic display, multi-level password access, data logging, and real time SPC monitoring of all plasma parameters is provided.
Standard Chamber: 14.75" X 14.75" X 28" inner dimensions, aluminum construction, with high-conductance KF 40 port and isolation valve.
Optional Chamber: 14.75" x 14.75" x 38" inner dimensions, aluminum construction, with high-conductance KF 40 port and isolation valve.
Electrode options include 5-shelf or 7-shelf configuration. Optional tumbler basket available.
RF Generator: 1000 watt 13.56 MHz air cooled with automatic impedance matching network. Water cooled style optional.
Process Pressure: Approx. 120 - 2000 mtorr
All stainless steel plumbing.
Display: Color 15" touch screen for control and monitoring of process parameters, automatic recipes, or manual plasma treatments.
Two user specified gases, with 500 sccm Stainless Steel MFCs come standard with an optional 3rd and/or 4th gas channel available.
Electronic and software interlocks
· RF power
· Pressure
· Chamber door open/close
Emergency OFF front and rear of reactor center and on wall box.
Password security for manual and edit modes.
Audible alarms
Software alarm limits on critical process parameters.
Over-temperature alarm sensor (generator).
Hard-wired RF relay interlocked with process chamber door.
External interlock connection to extend 24 VAC control loop.
Branson/IPC, Metroline, TePla Brands
The 7200 Series is a low pressure RF plasma system designed for general purpose cleaning and surface modification.
The 7200 offers:
Precision cleaning
Plasma deposited coatings
Versatile fixturing configurations
Reliable operation
Bulkhead Mountable
Color touch screen interface
Easy maintenance
Ideal for surface modification of:
· Medical devices
· Rigid and flex circuit processing
· Tissue culture media
· Potting of connectors and electronic devices
· And many other applications
This system presents impressive features and capabilities with particular emphasis on reliability and safety. The latest version incorporates new performance and control improvements in conjunction with proven production-worthy design features.
Did you know that PVA TePla may be able to perform maintenance, repair, or provide parts to this system? Please contact our customer service department for further information.
