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RF Plasma System 600 Series

Technical Specifications:

Plasma Chamber:
 Quartz, Diameter 245 mm, Depth 380 mm

Plasma Generation:
 RF Frequency 13.56 MHz
 max. 1000 Watt
 variable power

Options: Cassette loading station

 

Related Applications:

  • Photoresist Stripping
  • SU8 Ashing
  • PS 600 AL
     
    Plasma System 600  

    Microwave Plasma System PS 600

    The PS 600 series comprises of the models PS 600 S, PS 600 SA and PS 600 AL and are similar to the series PS 300 using plasma genertion at radio frequency of 13.56 MHz. All models are equipped with an automatic impedance matching and include an aluminum stand which contains the RF-generator and matching control unit.

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