 |
|||||||||||
|
 |
||||||||||
 |
|
||||||||||
|
|
||||||||||
| RF Plasma System 600 Series |
 |
Technical Specifications: Plasma Chamber: Quartz, Diameter 245 mm, Depth 380 mm Plasma Generation: RF Frequency 13.56 MHz, max. 1000 Watt, variable power Options: Cassette loading station
Related Applications: |
|
||||||||
Microwave Plasma System PS 600 The PS 600 series comprises of the models PS 600 S, PS 600 SA and PS 600 AL and are similar to the series PS 300 using plasma genertion at radio frequency of 13.56 MHz. All models are equipped with an automatic impedance matching and include an aluminum stand which contains the RF-generator and matching control unit. |
|
||||||||||
|
|
|||||||||||
 |
|
||||||||||
|
|
|||||||||||
|
|
|
|
|
||||||||
