PS 4011
(manual and automatic robot loading version)

The plasma system 4011 is designed for process development of flat panel displays. The chamber is loaded manually. The glass plates are easily placed in a flat position on the extractable drawer. Depending on the gas selected, the plasma has various chemical effects on the surface to be treated. The efficient microwave plasma source has no electrodes, ensuring fast and uniform processing of large substrates.

The PS4011 version for small volume and pilot line production is also available with gate valve and lift pins for automatic loading by a loading robot.

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