MICROWAVE PLASMA SYSTEM GIGAFAB SERIES

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Details

MICROWAVE PLASMA SYSTEM GIGAFAB M

Technical Specifications:

Plasma Chamber:
Aluminum
W x H x D = 410 x 140 x 410 mm

Plasma Generation:
MW Frequency 2.45 GHz
max. 1600 Watt
variable power

System Dimension:
W x H x D = approx. 850 x 2.000 x 1300 mm
Weight: 550 kg
Options:
Additional gas channels
Vacuum pump

Related Applications:

The GIGAfab series targets SU-8 Removal, MEMS Fabrication, Wafer Bumping and Flat Panel Display Technology.

These systesms feature:

Unique planar source geometry.
Temperature-controlled substrate plate for large area processing. (plate: 310 x 310 mm)
Drawer type unloading / loading.
Multiple substrates for Descum, Ashing and Surface Conditioning.
Microwave power: 2000 Watt max.
Certified Hydrogen gas option available.